Ion Implantation and Synthesis of Materials

Ion Implantation and Synthesis of Materials

Writing Stage
Published On
2006
Published By
ISBN
3540236740
ISBN13
9783540236740
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Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and circuits are seldom processed with less than 10 implantation steps. Controlled doping at controlled depths is an essential feature of implan ...more
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