Ion-Solid Interactions: Fundamentals and Applications

Ion-Solid Interactions: Fundamentals and Applications

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Writing Stage
Published On
2004
ISBN
0521616069
ISBN13
9780521616065
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Modern technology depends on materials with precisely controlled properties. Ion beams are an excellent way to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition to integrated ...more

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